Reflection high-energy electron diffraction (RHEED) is a technique used to characterize the surface of crystalline materials. For this purpose, kSA 400 analytical RHEED systems are used worldwide in production and research thin-film deposition chambers. They provide important real-time data for growth rate, surface roughness and lattice spacing as well as structural analysis.

The kSA 400 is already in its fifth generation and was developed by k-Space Associates, a long-time manufacturer of in situ, in-line, and ex situ metrology tools for the semiconductor, thin-film, and photovoltaic industries. It combines a high-speed, high-resolution and high-sensitivity CCD camera with RHEED-specific software. This flexible system provides the analysis of any image feature and controls the electron gun for such tasks as acquiring RHEED rocking curves.